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PPA-Litho

Commercial resist materials based on polyphthalaldehydes for advanced lithography applications

The polymer poly(phthalaldehyde) (PPA) is a material with remarkable properties for a wide range of applications, especially as a lithographic resist. This PPA-Litho project will enable the first commercial production of this outstanding polymer and lithographic resists using it. This will enable the participating SME's to gain a global market-leading position, especially in the area of thermal scanning probe lithography.
Project ID: 
9 045
Ranking: 
17
Cut-off: 
1
Start date: 
03-11-2014
Project Duration: 
36months
Project costs: 
1 616 500.00€
Technological Area: 
Micro- and Nanotechnology related to physical and exact sciences
Market Area: 
Other manufacturing (not elsewhere classified)