Commercial resist materials based on polyphthalaldehydes for advanced lithography applications
The polymer poly(phthalaldehyde) (PPA) is a material with remarkable properties for a wide range of applications, especially as a lithographic resist. This PPA-Litho project will enable the first commercial production of this outstanding polymer and lithographic resists using it. This will enable the participating SME's to gain a global market-leading position, especially in the area of thermal scanning probe lithography.
1 616 500.00€
Micro- and Nanotechnology related to physical and exact sciences
Other manufacturing (not elsewhere classified)