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FEMSPEC

Process control for the femtosecond laser surface modification by high resolution imaging spectroscopy

For the first time fast imaging acousto-optical spectrometer will be developed for industrial high precision femtosecond laser treatment of nanostructures. It will be adapted with industrial equipment, process features will be studied and process control algorithms will be developed.
Acronym: 
FEMSPEC
Project ID: 
4 296
Ranking: 
83
Cut-off: 
1
Start date: 
01-10-2008
Project Duration: 
36months
Project costs: 
1 350 000.00€
Technological Area: 
Micro- and Nanotechnology related to physical and exact sciences
Market Area: 
Process control equipment and systems