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Development of Enhanced MagnetrOn Sputtering process for deposition of advanced optical coatings

To perform necessary research, technology development and demonstration activities in order to: - Develop high-rate and high-precision control manufacturing technology, based on reactive magnetron sputtering, for advanced zirconia and hafnia optical coatings; - Introduce needed modifications in fabrication equipment.
Project ID: 
10 232
Ranking: 
36
Cut-off: 
4
Start date: 
01-01-2016
Project Duration: 
20months
Project costs: 
687 004.00€
Technological Area: 
Optical Materials
Market Area: 
Industrial Services